JPH01176926U - - Google Patents
Info
- Publication number
- JPH01176926U JPH01176926U JP7401388U JP7401388U JPH01176926U JP H01176926 U JPH01176926 U JP H01176926U JP 7401388 U JP7401388 U JP 7401388U JP 7401388 U JP7401388 U JP 7401388U JP H01176926 U JPH01176926 U JP H01176926U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- inlet
- outlet
- liquid
- curved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7401388U JPH01176926U (en]) | 1988-06-02 | 1988-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7401388U JPH01176926U (en]) | 1988-06-02 | 1988-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01176926U true JPH01176926U (en]) | 1989-12-18 |
Family
ID=31299131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7401388U Pending JPH01176926U (en]) | 1988-06-02 | 1988-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01176926U (en]) |
-
1988
- 1988-06-02 JP JP7401388U patent/JPH01176926U/ja active Pending